Nanoimprint lithography is a novel method of fabricating nanometer scale patterns. It is a simple process with low cost, high throughput and high resolution. It creates patterns by mechanical deformation of imprint resist and subsequent processes. The imprint resist is typically a monomer or polymer formulation that is cured by heat or UV light during the imprinting. Adhesion between the resist and the template is controlled to allow proper release.

Nanoimprinting stands for a number of methods where definition of lateral pattern of a surface layer is mechanically performed. The most important among these are embossing, printing, and molding. These techniques are characterized by the fact that a template carrying the envisaged nanopattern is replicated on a thin surface layer on the substrate.

Some of these techniques are well known for patterning in the micrometer and sub-millimeter range typical for micromechanical devices and MEMS (micro electro mechanical systems). The novel feature of nanoimprint is its application for nanometer patterning as well as its use as a lithography technique.

>>> Optical filters in sunscreen and skin cream
>>> Dirt repellents for cars and windows
>>> Flat screens
>>> Single electron transistors

Research in underway in the area of:

>>> Nanowheels, nanogears, nanofilters
>>> Drug pumps located in the human body, long-term depots
>>> Limunescent devices (after installation in zeolites)
>>> Energy storage (hydrogen in zeolites)
>>> Electronic devices

The following applications are expected particularly for the fullerenes:

>>> Particle absorption filters for cigarettes
>>> Chromatography
>>> Molecular containers
>>> Sensor cover layers for surface wave devices
>>> Additives in fuels
>>> Lubricants
>>> Catalysts for hydrogenation
>>> Photocatalysts for the production of atomic oxygen in laser therapy
>>> Production of artificial diamonds
>>> Functional polymers, photoconductive films
>>> Alkali meral MC60 chain formation [linear conductivity]
>>> Superconductivity [doping with alkali metals]
>>> Ion engines
>>> Raw materials for AIDS drugs
>>> Tools that are harder that diamond
>>> Nanoelectronic devices.

>>> MOS gate oxide
>>> Field oxide
>>> SOI oxide
>>> Amorphous layers for heterojunction solar cells, TFTs, optical sensors
>>> MOS channels
>>> Counter-doped Si layers for p-n junctions, transistors
>>> Recrystallized layers on dielectrics for device production
>>> Oxide as implantation and diffusion masks
>>> Oxide for the photolithography
>>> Silicides or metals for connections
>>> Epitaxial layers for transistors, laser, quantum detectors
>>> ITO for anti-reflection and charge collection in solar cells
>>> Back side surface field (BSF) layers in solar cells
>>> Metal layers for glasses, lenses, beam splitters, interferometers
>>> Anti-corrosion and passive layers

Nanolayers also have applications in corrosion and metallization.

Computer-controlled SPM permits real-time, hands-on human nanoparticle manipulation. One type of nanomanipulator system has a virtual-environment interface to SPMs something like a virtual reality game. It gives the researcher virtual surface accessibility at about a million-to-one scale. This direct human-SPM interaction provides not only enhanced measurement ability, but special transducers provide a sense of touch or force-feedback, called a haptic interface. They are still pretty crude, but in a few years the technology will be ready to do nanofabrication and/or repair of devices and structures.

Optical tweezers provide another way to grab and move nanometer structures around in 3-D. This ability is particularly important in studying atom and molecular dynamics, since molecular biophysics seeks to understand the behavior of single molecules. Optical tweezers make direct observation of structural parameters possible. Optical tweezers work by focusing a light beam on a particle in a liquid. The force of the light is strong enough to keep the particle in one place; if it moves toward the edge of the beam, the light very gently pushes it back toward the center of the focus. Using optical tweezers, researchers are able to understand how a protein or other polymer moves and responds to applied forces.

Nanomanipulators have been developed to be used in SEMs and TEMs by integrating one or more piezo-controlled tips (with several controlled directions of movement) into the sample holder.

A piezo-driven TEM specimen holder has been used to study the mechanical interaction between nanoscale crystals and mechanical loading/bending of carbon nanotubes. This type of specimen holder allows the testing of conductance through individual rows of atoms, making it possible for researchers to find the number of atoms in a samples nanostructure. Nanomanipulators are being used to test the newest electronic circuit boards and integrated circuits, since their tips are small enough to touch the tiny conducting contact pads.